The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2013
Filed:
Feb. 09, 2009
Yasuo Koide, Tsukuba, JP;
Meiyong Liao, Tsukuba, JP;
Jose Alvarez, Gif sur Yvette Cedex, FR;
Jean-paul Kleider, Gif sur Yvette Cedex, FR;
Yasuo Koide, Tsukuba, JP;
Meiyong Liao, Tsukuba, JP;
Jose Alvarez, Gif sur Yvette Cedex, FR;
Jean-Paul Kleider, Gif sur Yvette Cedex, FR;
National Institute for Materials Science, Ibaraki, JP;
Centre National de la Recherche Scientifique, Paris Cedex, FR;
Abstract
A method of manufacturing a diamond UV sensor element improved with a UV/visible light blind ratio using a diamond single crystal as a light receiving portion and detecting a light based on the change of electric resistance caused by a light irradiated to the light receiving portion is provided, the method, including (1) a step of hydrogenating the surface of the diamond single crystal in an atmosphere substantially containing hydrogen, and (2) a step of forming a light receiving portion by exposing the hydrogenated surface of the diamond single crystal into an atmosphere containing ozone or active oxygen.