The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2013
Filed:
Apr. 18, 2010
Dean C. Jennings, Beverly, MA (US);
Timothy N. Thomas, Portland, OR (US);
Samuel C. Howells, Portland, OR (US);
Bruce E. Adams, Portland, OR (US);
Jiping LI, Palo Alto, CA (US);
Dean C. Jennings, Beverly, MA (US);
Timothy N. Thomas, Portland, OR (US);
Samuel C. Howells, Portland, OR (US);
Bruce E. Adams, Portland, OR (US);
Jiping Li, Palo Alto, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Substrate processing equipment and methods are used to improve the uniformity of illumination across an illuminated portion of a substrate by processing light with multiple optical homogenizers. The multiple optical homogenizers each include micro-lens arrays and Fourier lens. The multiple optical homogenizers are arranged so that the output numerical aperture of one of the optical homogenizers is within 5% of the input numerical aperture of another optical homogenizer.