The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2013
Filed:
Jul. 21, 2009
Ronald Thomas Bertram, Jr., Mesa, AZ (US);
Chantal Arena, Mesa, AZ (US);
Christiaan J. Werkhoven, Gilbert, AZ (US);
Michael Albert Tischler, Scottsdale, AZ (US);
Vasil Vorsa, Coopersburg, PA (US);
Andrew D. Johnson, Doylestown, PA (US);
Ronald Thomas Bertram, Jr., Mesa, AZ (US);
Chantal Arena, Mesa, AZ (US);
Christiaan J. Werkhoven, Gilbert, AZ (US);
Michael Albert Tischler, Scottsdale, AZ (US);
Vasil Vorsa, Coopersburg, PA (US);
Andrew D. Johnson, Doylestown, PA (US);
Soitec, Bernin, FR;
Abstract
A semiconductor growth system includes a chamber and a source of electromagnetic radiation. A detector is arranged to detect absorption of radiation from the source by a chloride- based chemical of the reaction chamber. A control system controls the operation of the chamber in response to the absorption of radiation by the chloride-based chemical. The control system controls the operation of the chamber by adjusting a parameter of the reaction chamber.