The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2013
Filed:
Nov. 14, 2007
Johannes Classen, Reutlingen, DE;
Axel Franke, Ditzingen, DE;
Dietrich Schubert, Reutlingen, DE;
Kersten Kehr, Zwota, DE;
Ralf Reichenbach, Esslingen, DE;
Johannes Classen, Reutlingen, DE;
Axel Franke, Ditzingen, DE;
Dietrich Schubert, Reutlingen, DE;
Kersten Kehr, Zwota, DE;
Ralf Reichenbach, Esslingen, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A micromechanical acceleration sensor includes a substrate, an elastic diaphragm which extends parallel to the substrate plane and which is partially connected to the substrate, and which has a surface region which may be deflected perpendicular to the substrate plane, and a seismic mass whose center of gravity is situated outside the plane of the elastic diaphragm. The seismic mass extends at a distance over substrate regions which are situated outside the region of the elastic diaphragm and which include a system composed of multiple electrodes, each of which together with oppositely situated regions of the seismic mass forms a capacitor in a circuit. In its central region the seismic mass is attached to the elastic diaphragm in the surface region of the elastic diaphragm which may be deflected perpendicular to the substrate plane.