The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2013
Filed:
Mar. 24, 2010
Applicants:
Rainer Minixhofer, Unterpremistaetten, AT;
Sara Carniello, Graz, AT;
Volker Peters, Fürth, DE;
Inventors:
Assignee:
austriamicrosystems AG, Unterpremstätten, AT;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 43/04 (2006.01); H01L 43/14 (2006.01);
U.S. Cl.
CPC ...
Abstract
Through a main surface () of a semiconductor substrate () of a first type of conductivity, a doped well of a second type of conductivity is implanted to form a sensor region () extending perpendicularly to the main surface. The sensor region can be confined laterally by trenches () comprising an electrically insulating trench filling (). The bottom of the sensor region is insulated by a pn-junction (). Contacts () are applied to the main surface and provided for the application of an operation voltage and the measurement of a Hall voltage.