The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2013
Filed:
Oct. 29, 2010
Applicants:
Johannes Van Wingerden, Hardinxveld-Giessendam, NL;
Greja Johanna Adriana Maria Verheijden, Riethoven, NL;
Gerhard Koops, Aalst, BE;
Jozef Thomas Martinus Van Beek, Rosmalen, NL;
Inventors:
Johannes van Wingerden, Hardinxveld-Giessendam, NL;
Greja Johanna Adriana Maria Verheijden, Riethoven, NL;
Gerhard Koops, Aalst, BE;
Jozef Thomas Martinus van Beek, Rosmalen, NL;
Assignee:
NXP B.V., Eindhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/14 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed is a device comprising a substrate carrying a microscopic structure in a cavity capped by a capping layer including a material of formula SiNH, wherein x>1.33 and y>0. A method of forming such a device is also disclosed.