The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2013
Filed:
Oct. 12, 2010
Tatsuro Masuyama, Toyonaka, JP;
Kazuhiko Hashimoto, Toyonaka, JP;
Junji Shigematsu, Ibaraki, JP;
Sumitomo Chemical Company, Limited, Tokyo, JP;
Abstract
A Photoresist composition comprising a polymer comprising a structural unit derived from a compound represented by the formula (I): wherein Rrepresents a hydrogen atom or a methyl group, Rrepresents a C6-C12 aromatic hydrocarbon group which can have one or more substituents, Rrepresents a cyano group or a C1-C12 hydrocarbon group which can have one or more substituents and which can contain one or more heteroatoms, Arepresents a single bond, —(CH)—CO—O—* or —(CH)—O—CO—(CH)—CO—O—* wherein g, h and i each independently represent an integer of −1 to 6 and * represents a binding position to the nitrogen atom, a resin having an acid-labile group and being insoluble or poorly soluble in an aqueous alkali solution but becoming soluble in an aqueous alkali solution by the action of an acid, and an acid generator.