The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2013
Filed:
Apr. 16, 2010
Jakob Blattner, Ermatingen, CH;
Rudy Federici, Berg, CH;
William Fosnight, Carlisle, MA (US);
Clint Harris, Lunenburg, MA (US);
Jakob Blattner, Ermatingen, CH;
Rudy Federici, Berg, CH;
William Fosnight, Carlisle, MA (US);
Clint Harris, Lunenburg, MA (US);
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
A reticle manipulating device comprising a housing capable of having a controlled environment wherein at least one processing module is connected to the housing and capable of processing a reticle. A transport apparatus is connected to the housing for transporting the reticle between the at least one module to another portion of the housing. At least one module is removably connectable to the housing and at least one module has an interface adapted for removably coupling the module to the housing. One module being selectable for connection to the housing from a number of different interchangeable module each having a different predetermined characteristic and being capable of connection to the housing.