The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2013
Filed:
Nov. 13, 2009
Daniel Goodman, Lexington, MA (US);
Arthur Keigler, Wellesley, MA (US);
David G. Guarnaccia, Carlisle, MA (US);
Matthew R. Jeffers, Exeter, NH (US);
Daniel Goodman, Lexington, MA (US);
Arthur Keigler, Wellesley, MA (US);
David G. Guarnaccia, Carlisle, MA (US);
Matthew R. Jeffers, Exeter, NH (US);
Tel Nexx, Inc., Billerica, MA (US);
Abstract
A substrate thermal processing system. The system has at least one substrate holding module having a housing configured for holding an isolated environment therein. A substrate heater is located in the housing and has a substrate heating surface. A substrate cooler is located in the housing and having a substrate cooling surface. A gas feed opening into the housing and feeding inert or reducing gas into the housing when the substrate is heated by the heating surface. A gas restrictor is within the housing restricting the fed gas between the substrate heating surface and a surrounding atmospheric region substantially surrounding the substrate heating surface in the housing and forming an aperture through which the fed gas communicates with the atmospheric region.