The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2013
Filed:
Oct. 27, 2008
Applicant:
Masayoshi Kumagai, Hamamatsu, JP;
Inventor:
Masayoshi Kumagai, Hamamatsu, JP;
Assignee:
Hamamatsu Photonics K.K., Hamamatsu-shi, Shizuoka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/301 (2006.01);
U.S. Cl.
CPC ...
Abstract
A modified regionto become a starting point region for cutting is formed in a GaAs substratealong a line to cutupon radiation with laser light L which is pulsed laser light. As a consequence, the modified regionformed in the GaAs substratealong the line to cutis likely to generate fractures in the thickness direction of an object to be processed. Therefore, the modified regionhaving an extremely high function as a starting point region for cutting can be formed in the planar object to be processedcomprising the GaAs substrate