The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2013
Filed:
Oct. 02, 2007
Sakiko Tomonaga, Tokyo, JP;
Makoto Dobashi, Saitama, JP;
Junshi Yoshioka, Saitama, JP;
Ayumu Tateoka, Saitama, JP;
Mitsuyoshi Matsuda, Saitama, JP;
Hisao Sakai, Saitama, JP;
Sakiko Tomonaga, Tokyo, JP;
Makoto Dobashi, Saitama, JP;
Junshi Yoshioka, Saitama, JP;
Ayumu Tateoka, Saitama, JP;
Mitsuyoshi Matsuda, Saitama, JP;
Hisao Sakai, Saitama, JP;
Mitsui Mining & Smelting Co., Ltd., Tokyo, JP;
Abstract
An object of the present invention is to provide a method for preparing a sulfuric acid base copper electrolytic solution used for formation of an electro-deposited copper film comprising a surface excellent in smoothness and gloss when formed by using the solution just after preparation and is prepared by using mono-sulfides. To achieve the object, a sulfuric acid base copper electrolytic solution is made to contain a sulfonated active sulfur compound, the bis(3-sulfopropyl)disulfide which is recommended for formation of a glossy electro-deposited copper film. And the bis(3-sulfopropyl)disulfide contained is obtained by converting a 3-mercapto-1-propanesulfonic acid into the bis(3-sulfopropyl)disulfide in an aqueous solution of the 3-mercapto-1-propanesulfonic acid by an oxidation reaction. In the oxidation reaction, an air bubbling method is preferably used to prevent oxidative decomposition of the 3-mercapto-1-propanesulfonic acid.