The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 16, 2013

Filed:

Jul. 22, 2010
Applicants:

Hisayuki Yazawa, Niigata-ken, JP;

Kiyoshi Sato, Niigata-ken, JP;

Katsuya Kikuiri, Niigata-ken, JP;

Toru Takahashi, Niigata-ken, JP;

Hisanobu Ohkawa, Niigata-ken, JP;

Inventors:

Hisayuki Yazawa, Niigata-ken, JP;

Kiyoshi Sato, Niigata-ken, JP;

Katsuya Kikuiri, Niigata-ken, JP;

Toru Takahashi, Niigata-ken, JP;

Hisanobu Ohkawa, Niigata-ken, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
Abstract

A physical quantity sensor includes a support substrate, anchor portions fixed to a top surface of the support substrate, a movable portion positioned above the support substrate and supported by the anchor portions with support portions provided therebetween such that the movable portion is movable in a height direction, and detection portions for detecting a displacement of the movable portion. The support portions include beam portions provided between the movable portion and the anchor portions such that spring portions are provided between the beam portions and each of the movable portion and the anchor portions, the beam portions having a rigidity higher than a rigidity of the spring portions. The movable portion translates in the height direction owing to twisting of the spring portions and displacements in the height direction of distal ends of the beam portions, the movable portion being supported at the distal end.


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