X-ray convergence element and x-ray irradiation device

Abstract

An X-ray convergence element and an X-ray irradiation device including the X-ray convergence element are provided. The X-ray convergence element can extend a working distance from an exit-side opening end thereof to a specimen, and can perform analysis of the specimen with rough surface, a fluorescent X-ray analysis, and a X-ray diffraction analysis, regardless of a size of the specimen. An X-ray blocking memberis provided with three supporting membersfor supporting the X-ray blocking member, which extend from an annular memberhaving approximately the same diameter as a diameter of an entrance-side opening end (outer diameter of a capillary) toward the center of the X-ray blocking memberto fix the annular memberto the capillary. The annular member, the supporting members, and the X-ray blocking memberare integrally formed of a metal that shields X-rays, such as tantalum, tungsten, or molybdenum. A dimension of the X-ray blocking memberin the axial direction (thickness) is set to be sufficient for blocking X-rays.