The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2013
Filed:
Dec. 18, 2009
Applicants:
Hunjung Yi, Suwon-si, KR;
Jae-won Hahn, Seoul, KR;
Seungki Chae, Seoul, KR;
Chang-hoon OH, Seoul, KR;
Inventors:
HunJung Yi, Suwon-si, KR;
Jae-Won Hahn, Seoul, KR;
Seungki Chae, Seoul, KR;
Chang-Hoon Oh, Seoul, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon-Si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An optical apparatus for plasma includes a light collection lens provided to receive optical emission spectrum from plasma, a first aperture stop disposed between the light collection lens and the plasma to block out-focused light, a second aperture stop disposed between the light collection lens and an imaging area of the light collection lens to block in-focused light, and a pinhole disposed at the imaging area of the light collection lens to limit depth of focus.