The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2013
Filed:
Mar. 20, 2010
Damon W. Diehl, Rochester, NY (US);
Christopher T. Cotton, Honeoye Falls, NY (US);
Damon W. Diehl, Rochester, NY (US);
Christopher T. Cotton, Honeoye Falls, NY (US);
ASE Optics Inc., Rochester, NY (US);
Abstract
An optical probe for splitting a beam of light into multiple beams. The optical probe may comprise a first polarizing beam splitter having a first polarization axis, a second polarizing beam splitter having a second polarization axis orthogonal to the first polarization axis, a first half wave plate and a second half wave plate, and optionally a first birefringent phase plate, and a second birefringent phase plate. The first half wave plate may be located before first polarizing beam splitter, and the second half wave plate may be located after the first polarizing beam splitter, relative to the propagation of the light beam. The optical probe may further include a lens for collimating the four light beams. A profilometer includes the optical probe for splitting a beam of light into four light beams, and a scanner for traversing the optical probe over a surface of an element to be measured.