The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2013
Filed:
Jul. 15, 2010
Yeu Yong Lee, Seoul, KR;
Jung-jae Im, Gunpo-Si, KR;
Yeu Yong Lee, Seoul, KR;
Jung-Jae Im, Gunpo-Si, KR;
Chang Sung Ace Co., Ltd., Gyeonggi-Do, KR;
Abstract
A wafer inspection apparatus that performs surface inspection and internal inspection of solar cells using a single apparatus. The wafer inspection apparatus includes a loading unit configured to allow a cassette to be lifted up or lowered by an elevator. A surface inspection unit includes a plurality of stages, thus performing surface inspection of each wafer using a first vision module. A wafer transfer unit has a rotatably installed center portion and has both ends provided with adsorption parts. An internal inspection unit is configured such that a conveyor is installed to allow the wafer to be transferred, thus performing internal inspection of the transferred wafer through a second vision module. An unloading unit enables wafers having completed the internal inspection to be sequentially loaded onto the unloading unit. A control unit controls a series of wafer inspection procedures.