The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8415555 B1

PDF
Full Text
Expired
Date of Patent:
Apr. 09, 2013

Filed:

May. 04, 2011
Applicants:

Robert A. Bellman, Painted Post, NY (US);

Nicholas F. Borrelli, Elmira, NY (US);

David A. Deneka, Corning, NY (US);

Shawn M. O'malley, Horseheads, NY (US);

Vitor M. Schneider, Painted Post, NY (US);

Inventors:

Robert A. Bellman, Painted Post, NY (US);

Nicholas F. Borrelli, Elmira, NY (US);

David A. Deneka, Corning, NY (US);

Shawn M. O'Malley, Horseheads, NY (US);

Vitor M. Schneider, Painted Post, NY (US);

Assignee:

Corning Incorporated, Corning, NY (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 31/042 (2006.01);
U.S. Cl.
CPC ...
Abstract

Methods of fabricating dimensional silica-based substrates or structures comprising a porous silicon layers are contemplated. According to one embodiment, oxygen is extracted from the atomic elemental composition of a silica glass substrate by reacting a metallic gas with the substrate in a heated inert atmosphere to form a metal-oxygen complex along a surface of the substrate. The metal-oxygen complex is removed from the surface of the silica glass substrate to yield a crystalline porous silicon surface portion and one or more additional layers are formed over the crystalline porous silicon surface portion of the silica glass substrate to yield a dimensional silica-based substrate or structure comprising the porous silicon layer. Embodiments are also contemplated where the substrate is glass-based, but is not necessarily a silica-based glass substrate. Additional embodiments are disclosed and claimed.


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