The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2013
Filed:
Aug. 26, 2011
Stefan Kolb, Unterschleissheim, DE;
Reinhard Mahnkopf, Oberhaching, DE;
Christian Pacha, Munich, DE;
Bernhard Winkler, Munich, DE;
Werner Weber, Munich, DE;
Stefan Kolb, Unterschleissheim, DE;
Reinhard Mahnkopf, Oberhaching, DE;
Christian Pacha, Munich, DE;
Bernhard Winkler, Munich, DE;
Werner Weber, Munich, DE;
Infineon Technologies AG, Neubiberg, DE;
Abstract
Embodiments relate to micromachine structures. In one embodiment, a micromachine structure includes a first electrode, a second electrode, and a sensing element. The sensing element is mechanically movable and is disposed intermediate the first and second electrodes and adapted to oscillate between the first and second electrodes. Further, the sensing element includes a FinFET structure having a height and a width, the height being greater than the width.