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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8414968 B1

PDFFull Text
Date of Patent:
Apr. 09, 2013

Filed:

Jun. 25, 2009

In-line film forming apparatus and manufacturing method of magnetic recording medium

Applicant:

Satoru Ueno, Chiba, JP;

Inventor:

Satoru Ueno, Chiba, JP;

Assignee:

Showa Denko K.K., Tokyo, JP;

Attorney:

Sughrue Mion, PLLC

Primary Examiner:

Timothy Meeks

Assistant Examiner:

Mandy Louie

Int. Cl.
CPC ...
G11B 5/00 (2006.01); G11B 17/00 (2006.01); G11B 21/00 (2006.01); H01L 21/677 (2006.01); B66C 1/00 (2006.01); B65G 15/58 (2006.01);
U.S. Cl.
CPC ...
Abstract

An in-line film forming apparatus capable of conveying a carrier at a high speed, increasing the exhaust capability within a film forming chamber, and easily realizing a high vacuum degree in a short time is provided. A conveyor mechanism has a linear motor drive mechanism which drives the carrier in a noncontact state, a horizontal guide mechanism which is provided so as to be able to contact a side portion of the carrier, and guides the carrier driven by the linear motor drive mechanism in a horizontal direction, and a vertical guide mechanism which is provided so as to be able to contact a lower end of the carrier, and guides the carrier driven by the linear motor drive mechanism in the vertical direction.

Find Patent Forward Citations

Ueno, Satoru. (2013). In-line film forming apparatus and manufacturing method of magnetic recording medium (U.S. Patent No. 8414968). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8414968

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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