The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2013
Filed:
Sep. 14, 2009
Yoshiaki Tatsumi, Kawasaki, JP;
Hiroshi Fujisawa, Nara, JP;
Yoshiaki Tatsumi, Kawasaki, JP;
Hiroshi Fujisawa, Nara, JP;
Creative Technology Corporation, Tokyo, JP;
Abstract
Provided is an electrostatic chuck () of self power supply type, which is capable of supplying power while generating power to be used by an attraction electrode () during processing of a substrate. The electrostatic chuck () attracts and holds a substrate in a substrate processing apparatus () that processes the substrate while generating optical energy. The electrostatic chuck () includes: an electrode sheet () including an attraction electrode (); a metal base () having the electrode sheet () laminated on an upper surface side thereof; an internal power supply for obtaining power to be supplied to the attraction electrode (); and a voltage boost circuit () for boosting voltage of the power obtained by the internal power supply. The internal power supply includes a solar cell (), and converts the optical energy into the power during the processing of the substrate, to thereby cause the electrode sheet () to attract and hold the substrate.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile