The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2013
Filed:
Jan. 21, 2011
Applicants:
Nathan Lazarus, Pittsburgh, PA (US);
Gary Fedder, Turtle Creek, PA (US);
Sarah Bedair, Bethesda, MD (US);
Chiung Lo, Campbell, CA (US);
Inventors:
Nathan Lazarus, Pittsburgh, PA (US);
Gary Fedder, Turtle Creek, PA (US);
Sarah Bedair, Bethesda, MD (US);
Chiung Lo, Campbell, CA (US);
Assignee:
Carnegie Mellon University, Pittsburgh, PA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/14 (2006.01);
U.S. Cl.
CPC ...
Abstract
A capacitive chemical sensor, along with methods of making and using the sensor are provided. The sensors described herein eliminate undesirable capacitance by etching away the substrate underneath the capacitive chemical sensor, eliminating most of the substrate capacitance and making changes in the chemical-sensitive layer capacitance easier to detect.