The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2013
Filed:
Jan. 27, 2011
Shohei Terada, Hitachinaka, JP;
Tatsumi Hirano, Hitachinaka, JP;
Koichi Watanabe, Hitachi, JP;
Yasuichiro Watanabe, Mito, JP;
Hiromitsu Seino, Iwaki, JP;
Shohei Terada, Hitachinaka, JP;
Tatsumi Hirano, Hitachinaka, JP;
Koichi Watanabe, Hitachi, JP;
Yasuichiro Watanabe, Mito, JP;
Hiromitsu Seino, Iwaki, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A sample transfer device is provided which can insert to a charged particle beam apparatus a sample to be observed and analyzed under irradiation of a charged particle beam while suppressing to a minimum the time to expose the sample to the atmospheric environment. The sample transfer device for transferring the sample to be observed and analyzed by irradiating the charged particle beam comprises an expansible hollow member capable of accommodating a sample holder mounting the sample, a fixing member for fixing the sample holder within the expansible hollow member, and a sealing member communicating with the interior of the expansible hollow member to open/close an opening through which the sample holder passes.