The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2013
Filed:
Dec. 14, 2010
Frederik Willem Maurits Vanhelmont, Maaseik, BE;
Rensinus Cornelis Strijbos, Nijmegen, NL;
Andreas Bernardus Maria Jansman, Nuenen, NL;
Robertus Adrianus Maria Wolters, Eindhoven, NL;
Johannes Van Wingerden, Hardinxveld-Giessendam, NL;
Fredericus Christiaan Van Den Heuvel, Waalre, NL;
Frederik Willem Maurits Vanhelmont, Maaseik, BE;
Rensinus Cornelis Strijbos, Nijmegen, NL;
Andreas Bernardus Maria Jansman, Nuenen, NL;
Robertus Adrianus Maria Wolters, Eindhoven, NL;
Johannes van Wingerden, Hardinxveld-Giessendam, NL;
Fredericus Christiaan van den Heuvel, Waalre, NL;
NXP B.V., Eindhoven, NL;
Abstract
A method of manufacturing a Bulk Acoustic Wave device by providing an active layer formed of an electro-mechanical transducer material, providing a first electrode on the active layer, defining a first electrode portion of the device, whereby a remaining portion of the device is defined around the first electrode, providing a stop-layer on the first electrode, depositing a first dielectric layer on the resultant structure, and planarizing the first dielectric layer until the stop-layer on the first electrode is exposed.