The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2013
Filed:
Dec. 19, 2008
Applicants:
Stephan Jost, Azmoos, CH;
Andreas Belinger, Azmoos, CH;
Inventors:
Stephan Jost, Azmoos, CH;
Andreas Belinger, Azmoos, CH;
Assignee:
Oerlikon Solar AG, Trubbach, Trubbach, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 21/461 (2006.01);
U.S. Cl.
CPC ...
Abstract
A large surface substrate () is Rf vacuum plasma treated with the help of an electrode arrangement () consisting of an even number of electrode strips (). At least one of the strips is Rf supplied at least two distinct loci (P, P) along the central axis (A) of the addressed strip ().