The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2013
Filed:
Aug. 25, 2009
Applicant:
Bradley M. Kraft, Fairport, NY (US);
Inventor:
Bradley M. Kraft, Fairport, NY (US);
Assignee:
Ferro Corporation, Cleveland, OH (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 21/461 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention provides an aqueous CMP slurry composition that includes abrasive particles and from about 0.01% to the limit of solubility in water of a compound according to Formula (I): wherein only one of R, R, R, Rand Ris a hydroxyl group (—OH), only one of R, R, R, Rand Ris a methoxy group (—OCH), and the three of R, R, R, Rand Rthat are not either a hydroxyl group (—OH) or a methoxy group (—OCH) are hydrogen atoms (—H).