The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 26, 2013

Filed:

Nov. 23, 2009
Applicants:

Jong-han Shin, Gyeonggi-do, KR;

Cheol-hwi Ryu, Gyeonggi-do, KR;

Sung-jun Kim, Gyeonggi-do, KR;

Inventors:

Jong-Han Shin, Gyeonggi-do, KR;

Cheol-Hwi Ryu, Gyeonggi-do, KR;

Sung-Jun Kim, Gyeonggi-do, KR;

Assignee:

Hynix Semiconductor Inc., Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for fabricating a semiconductor device with a buried gate includes: etching a substrate to form a plurality of trenches; forming a plurality of buried gates that fill lower portions of the trenches; forming a plurality of sealing layers that gap-fill upper portions of the trenches and have protrusions higher than a top surface of the substrate; forming an inter-layer insulation layer over the whole surface of the substrate including the sealing layers; and etching the inter-layer insulation layer to form a contact hole that is aligned with a space between the protrusions of the sealing layers.


Find Patent Forward Citations

Loading…