The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2013
Filed:
Sep. 24, 2009
Eigo Kawakami, Utsunomiya, JP;
Hideki Ina, Tokyo, JP;
Junichi Seki, Yokohama, JP;
Atsunori Terasaki, Kawasaki, JP;
Shingo Okushima, Kawasaki, JP;
Motoki Okinaka, Inagi, JP;
Eigo Kawakami, Utsunomiya, JP;
Hideki Ina, Tokyo, JP;
Junichi Seki, Yokohama, JP;
Atsunori Terasaki, Kawasaki, JP;
Shingo Okushima, Kawasaki, JP;
Motoki Okinaka, Inagi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An imprint apparatus for pressing resin and a mold to each other in a Z-axis direction to form a resin pattern on a shot region includes: a mold chuck; an X-Y stage; a reference mark formed on the stage; a first scope configured to measure a positional deviation in an x-y plane between a mold mark and the reference mark; a second scope configured to measure a position of a substrate mark in the plane not via the mold mark; and a dispenser configured to dispense resin. In the plane, the dispenser center is deviated in position from the mold chuck center by a first distance in a first direction, and the second scope center is deviated in position from the dispenser center by a distance smaller than twice the first distance in the first direction or a second direction opposite thereto.