Method of manufacturing a discrete track medium type perpendicular magnetic recording medium

Abstract

A method of manufacturing a discrete track medium type perpendicular magnetic recording layer with reduced magnetic interference between tracks and enhanced magnetic recording density is disclosed in which protruding parts of a pattern of protrusions and recesses provided in a composite magnetic recording layer are formed in high quality having a similar film thickness and equivalent perpendicular magnetic recording performance to a perpendicular magnetic recording layer designed for a continuous film type medium. The method includes a first step of laminating at least a magnetic recording layer, a sacrifice layer, and a carbon protective layer on a nonmagnetic substrate in this order; a second step of selectively removing the resist film and the carbon protective layer at openings for forming recessed parts using a mask of a resist film pattern formed concentric to form protruding parts for constructing recording tracks; a third step of modifying the sacrifice layer and the magnetic recording layer exposing at the recessed parts into a nonmagnetic state; a fourth step of removing the resist film, the carbon protective layer, and the sacrifice layer at the protruding parts between the recessed parts; and a fifth step of depositing a carbon protective layer and a lubricant layer in this order on the recessed parts and the protruding parts.