The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2013
Filed:
Oct. 14, 2010
Yasunori Furukawa, Utsunomiya, JP;
Tokuyuki Honda, Tokyo, JP;
Yasunori Furukawa, Utsunomiya, JP;
Tokuyuki Honda, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An interferometer that measures a shape of a surface of an inspection object includes an interference optical system that splits light from a light source into inspection light and reference light and causes the inspection light reflected by the surface of the inspection object and the reference light to interfere with each other, and a photoelectric conversion element that detects interference fringes produced by interference between the inspection light and the reference light. The interference optical system includes a first optical element that transmits and reflects the inspection light, a second optical element that reflects the inspection light, and a moving unit configured to move the second optical element. The inspection light passes through the first optical element, is reflected by the second optical element, is reflected by the first optical element, and is then incident on the surface of the inspection object.