The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2013
Filed:
Feb. 10, 2009
Applicants:
Paolo Manini, Milan, IT;
Andrea Conte, Milan, IT;
Inventors:
Paolo Manini, Milan, IT;
Andrea Conte, Milan, IT;
Assignee:
Saes Getters S.p.A., Lainate (MI), IT;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/56 (2006.01); G03B 27/52 (2006.01);
U.S. Cl.
CPC ...
Abstract
A lithography apparatus () is disclosed using extreme UV radiation and having a hydrocarbon sorbing member comprising a getter material arranged in the process chamber () of said apparatus.