The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 19, 2013

Filed:

Feb. 03, 2010
Applicants:

Hiroyuki Oda, Shunan, JP;

Takuya Asano, Shunan, JP;

Inventors:

Hiroyuki Oda, Shunan, JP;

Takuya Asano, Shunan, JP;

Assignee:

Tokuyama Corporation, Shunan-Shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/26 (2006.01);
U.S. Cl.
CPC ...
Abstract

The process for producing polycrystalline silicon by feeding a reaction gas containing a silane gas and a hydrogen gas into a reaction vessel equipped with silicon core members erected on the electrodes, heating the silicon core members by flowing an electric current thereto to a temperature at which silicon deposits, forming polycrystalline silicon rods by allowing the formed silicon to deposit on the silicon core members, and discharging the discharge gas after the reaction from the reaction vessel, wherein the discharge gas discharged from the reaction vessel is quenched so that the temperature thereof drops from 800° C. down to 500° C. in not longer than 0.1 second.


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