The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2013
Filed:
Jul. 31, 2007
Yi Jung Kim, Chungcheongnam-do, KR;
Kyung Jin Seo, Chungcheongnam-do, KR;
Chang RO Yoon, Chungcheongnam-do, KR;
Jung Keun Cho, Chungcheongnam-do, KR;
Yi Jung Kim, Chungcheongnam-do, KR;
Kyung Jin Seo, Chungcheongnam-do, KR;
Chang Ro Yoon, Chungcheongnam-do, KR;
Jung Keun Cho, Chungcheongnam-do, KR;
Semes Co. Ltd., Chungcheongnam-Do, KR;
Abstract
A substrate treating apparatus for stripping photoresist on a substrate includes a support part for supporting the substrate, a dry-type treating part for stripping the photoresist on the substrate, and a wet-type treating part for stripping the photoresist on the substrate. While the substrate is supported by the support part, the photoresist on the substrate is primarily stripped by means of the dry-type treating part and secondarily stripped by means of the wet-type treating part. The dry-type treating part includes a plasma supply unit configured to supply plasma onto the substrate and a moving unit configured to vary a relative position of the plasma supply unit and the substrate.