The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 19, 2013

Filed:

Mar. 14, 2005
Applicants:

Armin Conrad, Herborn, DE;

Peter Fahrenbach, Braunfels, DE;

Inventors:

Armin Conrad, Herborn, DE;

Peter Fahrenbach, Braunfels, DE;

Assignee:

Pfeiffer Vacuum GmbH, Asslar, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F01D 1/36 (2006.01);
U.S. Cl.
CPC ...
Abstract

A turbomolecular pump includes a plurality of alternatively axially arranged one behind another, rotor and stator discs () provided with blades (), with the blades () located in vicinity of the high vacuum side having a blade angle (α) that is steeper than blade angle (α) of the blades () located in vicinity of the vacuum side, and with the blade angle (α) of the blades () located in the vicinity of the vacuum side () amounting to less than 8°.


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