The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2013
Filed:
May. 26, 2006
William Holtkamp, Newark, CA (US);
Izya Kremerman, Los Gatos, CA (US);
Christopher Hofmeister, Hampstead, NH (US);
Richard Pickreign, Harvard, MA (US);
William Holtkamp, Newark, CA (US);
Izya Kremerman, Los Gatos, CA (US);
Christopher Hofmeister, Hampstead, NH (US);
Richard Pickreign, Harvard, MA (US);
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
A substrate processing apparatus includes a transport chamber capable of holding an isolated atmosphere therein and communicably connected to a charging station for loading and unloading a substrate into the apparatus, a transport system inside the transport chamber for transporting the substrate and an array of processing chamber modules distributed alongside the transport chamber and communicably connected to the transport chamber to allow the substrate to be transferred therebetween.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile