The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2013
Filed:
Aug. 30, 2005
Stephan Behle, Gau-Odernheim, DE;
Andreas Lüettringhaus-henkel, Darmstadt, DE;
Peter Eimann, Schwabenheim, DE;
Juergen Klein, Mainz, DE;
Stephan Behle, Gau-Odernheim, DE;
Andreas Lüettringhaus-Henkel, Darmstadt, DE;
Peter Eimann, Schwabenheim, DE;
Juergen Klein, Mainz, DE;
Schott AG, Mainz, DE;
Abstract
The invention provides a process for coating workpieces by plasma-induced chemical vapor deposition, in which a process gas is introduced into a coating chamber and a plasma is ignited by electromagnetic energy in at least one region of the coating chamber which adjoins the workpiece and in which the process gas is present, wherein the coating operation is monitored on the basis of at least one measured spectral parameter of the plasma, and the workpiece is removed in the event of a deviation from a desired range for the parameter.