The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2013
Filed:
Jul. 15, 2008
Fabrice Verjus, Creully, FR;
Archit Giridhar, Singapore, SG;
Fabrice Verjus, Creully, FR;
Archit Giridhar, Singapore, SG;
NXP B.V., Eindhoven, NL;
Abstract
A MEMS multiaxial inertial sensor of angular and linear displacements, velocities, or accelerations has four comb drive capacitive sensing elements integrated on a planar substrate, each sensing element having an output responsive to displacement along a Z axis, and responsive to a displacement along X or Y axes. The sensing elements are located at different parts of the substrate on both sides of the X axis and the Y axis, the outputs being suitable for subsequently deriving linear and angular displacements about any of the X, Y or Z axes. Linear or angular movement is determined from combinations of the sensor signals.