The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2013
Filed:
May. 08, 2008
Johan H. Klootwijk, Eindhoven, NL;
Hendrik J. Bergveld, Eindhoven, NL;
Freddy Roozeboom, Waalre, NL;
Derk Reefman, Best, NL;
Jaap Ruigrok, Aste, NL;
Johan H. Klootwijk, Eindhoven, NL;
Hendrik J. Bergveld, Eindhoven, NL;
Freddy Roozeboom, Waalre, NL;
Derk Reefman, Best, NL;
Jaap Ruigrok, Aste, NL;
NXP B.V., Eindhoven, NL;
Abstract
The present invention relates to a configurable trench multi-capacitor device comprising a trench in a semiconductor substrate. The trench has a lateral extension exceeding 10 micrometer and a trench filling includes a number of at least four electrically conductive capacitor-electrode layers. A switching unit is provided that comprises a plurality of switching elements electrically interconnected between different capacitor-electrode layers of the trench filling. A control unit is connected with the switching unit and configured to generate and provide to the switching unit respective control signals for forming a respective one of a plurality of multi-capacitor configurations using the capacitor-electrode layers of the trench filling.