The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2013
Filed:
May. 05, 2010
Guoyi Zhang, Dongwan, CN;
Xinrong Yang, Dongwan, CN;
Mingkun He, Dongwan, CN;
Yongjian Sun, Dongwan, CN;
Guoyi Zhang, Dongwan, CN;
Xinrong Yang, Dongwan, CN;
Mingkun He, Dongwan, CN;
Yongjian Sun, Dongwan, CN;
Sino Nitride Semiconductor Co., Ltd., Dongguan, Guang Dong, CN;
Abstract
A solid-state laser lift-off apparatus comprises: a solid-state laser (), a light beam shaping lens (), motors of oscillating mirrors (), oscillating mirrors (), a field lens (), a movable platform (), an industrial control computer and control software (). The light beam shaping lens () is behind the solid-state laser (), shaping the laser beam from the solid-state laser () into required shape. The motors of oscillating mirrors () are in front of the field lens (), controlling the movement of the oscillating mirrors () according to the instruction of the control software () to implement different light beam scanning paths. A lift-off method for applying the solid-state laser lift-off apparatus uses a small laser spot to perform scanning, and enables damage-free separation of GaN from a sapphire substrate.