The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2013
Filed:
Jul. 11, 2008
Andrew W. Tudhope, Danville, CA (US);
Thomas B. Casserly, San Ramon, CA (US);
Karthik Boinapally, Fremont, CA (US);
Deepak Upadhyaya, Fremont, CA (US);
William J. Boardman, Danville, CA (US);
Andrew W. Tudhope, Danville, CA (US);
Thomas B. Casserly, San Ramon, CA (US);
Karthik Boinapally, Fremont, CA (US);
Deepak Upadhyaya, Fremont, CA (US);
William J. Boardman, Danville, CA (US);
Sub-One Technology, Inc., Pleasanton, CA (US);
Abstract
Enhanced corrosion resistance is achieved in a coating by using a germanium-containing precursor and hollow cathode techniques to form a first layer directly on the surface of a workpiece, prior to forming an outer layer, such as a layer of diamond-like carbon (DLC). The use of a germanium or germanium-carbide precursor reduces film stress and enables an increase in the thickness of the subsequently formed DLC. Germanium incorporation also reduces the porosity of the layer. In one embodiment, a cap layer containing germanium is added after the DLC in order to further reduce the susceptibility of the coating to chemical penetration from the top.