The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2013
Filed:
May. 15, 2008
Applicants:
Kazuyuki Kasumi, Utsunomiya, JP;
Hirohisa Ota, Kawagoe, JP;
Eigo Kawakami, Utsunomiya, JP;
Takashi Nakamura, Tokyo, JP;
Toshinobu Tokita, Utsunomiya, JP;
Inventors:
Kazuyuki Kasumi, Utsunomiya, JP;
Hirohisa Ota, Kawagoe, JP;
Eigo Kawakami, Utsunomiya, JP;
Takashi Nakamura, Tokyo, JP;
Toshinobu Tokita, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B29C 59/00 (2006.01); B29C 59/02 (2006.01); H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract
A processing apparatus for transferring a relief pattern on a mold to a resist on a substrate through a compression of the mold against the resist, includes a supplier for supplying the resist between the substrate and the mold, and a recovery unit for recovering the resist.