The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 05, 2013

Filed:

Jun. 24, 2011
Applicants:

Takayuki Naono, Kanagawa-ken, JP;

Takami Arakawa, Kanagawa-ken, JP;

Inventors:

Takayuki Naono, Kanagawa-ken, JP;

Takami Arakawa, Kanagawa-ken, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

A piezoelectric film includes crystals of a complex oxide having a perovskite structure with (100)-preferred orientation and represented as: Pb[(ZrTi)Nb]O, where x is a value in a range of 0<x<1, y is a value in a range of 0.13≦y≦0.25, and δ and z are values within ranges where the perovskite structure is obtained and δ=0 and z=3 are standard, wherein a ratio between a diffraction peak intensity I(100) from a perovskite (100) plane and a diffraction peak intensity I(200) from a perovskite (200) plane as measured by X-ray diffraction satisfies I(100)/I(200)≧1.25.


Find Patent Forward Citations

Loading…