The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2013
Filed:
Mar. 30, 2009
Takaaki Yoshihara, Osaka, JP;
Yoshiki Hayasaki, Osaka, JP;
Takeo Shirai, Osaka, JP;
Tomoaki Matsushima, Kizugawa, JP;
Hiroshi Kawada, Neyagawa, JP;
Yousuke Hagihara, Katano, JP;
Takaaki Yoshihara, Osaka, JP;
Yoshiki Hayasaki, Osaka, JP;
Takeo Shirai, Osaka, JP;
Tomoaki Matsushima, Kizugawa, JP;
Hiroshi Kawada, Neyagawa, JP;
Yousuke Hagihara, Katano, JP;
Panasonic Corporation, Osaka, JP;
Abstract
The MEMS switch comprises a substrate with signal-lines having fixed-contacts, a movable-plate with a movable-contact, a flexible support-member supporting the movable-plate, a static-actuator and a piezoelectric-actuator configured to contact the movable-contact with the fixed-contact. The movable-contact is provided at its longitudinal center with the movable-contact, and its both the longitudinal ends with static-movable-electrode-plate. The support-member is four strips disposed on portions outside of the both width ends of the movable plate. The strip extends along the longitudinal direction of the movable plate, provided with a first end fixed to the movable plate, and provided with a second end fixed to the substrate. The piezoelectric-element is disposed on an upper surface of the strip to be located at a portion outside of the width ends of the movable-plate. The piezoelectric-actuator is configured to develop the stress applied to the coupling-portion which is created between each the strip and the movable-plate.