The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2013
Filed:
May. 06, 2011
Satoshi Matsui, Kanagawa, JP;
Satoshi Matsui, Kanagawa, JP;
Renesas Electronics Corporation, Kanagawa, JP;
Abstract
A semiconductor deviceis provided with a multiplex through plugthat fills an opening extending through the silicon substrate. The multiplex through plugscomprises a column-shaped and solid first through electrode, a first insulating filmthat covers the cylindrical face of the first through electrode, a second through electrodethat covers the cylindrical face of the first insulating filmand a second insulating filmthat covers the cylindrical face of the second through electrode, and these have a common central axis. The upper cross sections of the first insulating film, the second through electrodeand the second insulating filmare annular-shaped.