The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2013
Filed:
Aug. 31, 2007
Pauls Stradins, Golden, CO (US);
Qi Wang, Littleton, CO (US);
Pauls Stradins, Golden, CO (US);
Qi Wang, Littleton, CO (US);
Alliance for Sustainable Energy, LLC, Golden, CO (US);
Abstract
A rapid thermal processing device and methods are provided for thermal processing of samples such as semiconductor wafers. The device has components including a stamp () having a stamping surface and a heater or cooler () to bring it to a selected processing temperature, a sample holder () for holding a sample () in position for intimate contact with the stamping surface; and positioning components () for moving the stamping surface and the stamp () in and away from intimate, substantially non-pressured contact. Methods for using and making such devices are also provided. These devices and methods allow inexpensive, efficient, easily controllable thermal processing.