The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2013
Filed:
Dec. 26, 2006
Takeshi Sakamoto, Hamamatsu, JP;
Kenichi Muramatsu, Hamamatsu, JP;
Takeshi Sakamoto, Hamamatsu, JP;
Kenichi Muramatsu, Hamamatsu, JP;
Hamamatsu Photonics K.K., Hamamatsu-shi, Shizuoka, JP;
Abstract
An object to be processedcomprising a substrateand a plurality of functional devicesformed on a front faceof the substrateis irradiated with laser light L while locating a converging point P within the substrate, so as to form at least one row of a divided modified region, at least one row of a quality modified regionpositioned between the divided modified regionand the front faceof the substrate, and at least one row of an HC modified regionpositioned between the divided modified regionand a rear faceof the substratefor one line to cut. Here, in a direction along the line to cut, a forming density of the divided modified regionis made lower than that of the quality modified regionand that of the HC modified region