The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2013
Filed:
Apr. 23, 2012
Tiansheng Zhou, Edmonton, CA;
Tiansheng Zhou, Edmonton, CA;
Other;
Abstract
A method of manufacturing a capacitive transducer by applying a first etching mask on a layer. Applying a second etching mask to define the movable set of fingers, the fixed set of fingers, a body, and springs, and the body is connected to the movable set of fingers and the springs while the movable set of fingers are interdigitated with the fixed set of fingers. Etching the layer and the first etching mask using the second etching mask and removing the second etching mask. Etching the layer such that one of the movable set of fingers and the fixed set of fingers is shorter than the other of the movable set of fingers and the fixed set of fingers. Releasing the body, the springs, and the movable set of fingers using etching, such that, upon applying a force to the body, the body moves parallel to the substrate.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile