The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2013
Filed:
Aug. 24, 2009
Daisuke Shimao, Tainai, JP;
Katsuaki Inoue, Shibata, JP;
Takashi Kurata, Sekikawa, JP;
Hitachi Industrial Equipment Systems Co., Ltd., Kanda Neribei-cho, Chiyoda-ku Tokyo, JP;
Abstract
The present invention provides a precision press device and a press load control method thereof for downsizing a vacuum chamber in press work in the vacuum chamber, shortening a time required to reach a vacuum and further performing high accuracy pressure control. To downsize a chamber, a pressure sensor is set up outside the chamberand a cylinder chamberis formed to allow a tubular plungerto slide up and down using the tubular shape of the chamber. A negative pressurein the chamberattracts the pressurized sectionand the pressurizing sectionto each other, but by injecting an equivalent pressureof a fluid into the cylinder chamber, pushing out the tubular plunger, the attractive forces are canceled out. It is possible to control the load on the substrate or the like transferred by the press stage with high accuracy.