The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2013
Filed:
Nov. 30, 2009
Andrew C. Mcneil, Chandler, AZ (US);
Yizhen Lin, Gilbert, AZ (US);
Woo Tae Park, Chandler, AZ (US);
Freescale Semiconductor, Inc., Austin, TX (US);
Abstract
A microelectromechanical systems (MEMS) sensor device () includes a substrate () having sensors () disposed on the same side () of the substrate () and laterally spaced apart from one another. The sensor () includes a sense element (), and the substrate () includes a cavity () extending through the substrate () from the backside () of the substrate () to expose the sense element () to an external environment (). The sense element () is movable in response to a stimulus () from the environment () due to its exposure to the environment () via the cavity (). Fabrication methodology () entails concurrently forming the sensors () on substrate () by implementing MEMS process flow, followed by creating the cavity () through the substrate () to expose the sense element () to the environment ().