The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2013
Filed:
May. 08, 2009
Shigeki Kato, Shimotsuke, JP;
Shigeki Kato, Shimotsuke, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An interferometer of the present invention includes a PBSwhich splits light into reference light and measurement light, a reference mirrorwhich reflects the reference light entering the reference mirror from a first direction, a measurement mirrorwhich reflects the measurement light entering the measurement mirror from a second direction, a lens systemwhich reflected lights from the reference mirrorand the measurement lightenter, a reflective devicewhich reflects light from the lens system, and a light receiving devicewhich receives multiplexed light, wherein the reference mirrorand the measurement mirrorare in a conjugate relation with respect to the reflective device, and at least one of the reference mirrorand the measurement mirroris tilted so that its normal direction differs from the first and the second direction.