The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 26, 2013

Filed:

May. 12, 2011
Applicants:

Yohsuke Kawasaki, Yamanashi, JP;

Hideo Mano, Chofu, JP;

Inventors:

Yohsuke Kawasaki, Yamanashi, JP;

Hideo Mano, Chofu, JP;

Assignee:

Canon Anelva Corporation, Kawasaki-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 21/30 (2006.01); G01L 21/34 (2006.01);
U.S. Cl.
CPC ...
Abstract

The present invention provides a cold cathode ionization vacuum gauge that can trigger discharge in a short time even after a long period of operation. The cold cathode ionization vacuum gauge of an embodiment of the present invention includes an anode, a cathode disposed so as to form a discharge space together with the anode, and a discharge starting auxiliary electrode disposed in the discharge space and electrically connected to the cathode. The discharge starting auxiliary electrode has an electrode part disposed in parallel with an axially longitudinal direction of the anode.


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